The design of miniaturised displacement transducers for deep hole diameter measurement
The design of miniaturised displacement transducers for deep hole diameter measurement
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DOI：
10.1016/s0957-4158(99)00004-5
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发表时间：
1999-06-01
期刊：
影响因子：
3.3
通讯作者：
Corcoran, P
中科院分区：
文献类型：
--
作者：
Tian, GY;Zhao, ZX;Corcoran, P
本文提出了一种用于深孔测量的嵌入式位移传感器的设计方法。通过利用芯片线圈检测到的感应涡流效应，传感器产生频率输出信号。传感器芯片线圈可以通过与用于制造印刷电路板（PCB）的工艺类似的工艺来制造，这允许它们被封装。详细阐述了将位移直接转换为频率输出的结构和机理。它还报告了传感器，它使用两个接触式探头的位移传输到一个非接触式传感元件。实验结果表明，该传感器系统具有良好的稳定性、线性度、测量范围和测量精度。(C)1999爱思唯尔科技有限公司。保留所有权利。
The paper presents a new approach to the design of a miniaturised displacement transducer for deep hole measurement. By exploiting the induced eddy current effects detected by chip coils, the sensor generates a frequency output signal. The sensor chip coil can be manufactured by the similar processes to those used for manufacturing a printed circuit board (PCB) which allows them to be miniaturised. The paper elaborates on the construction and mechanism by which the displacement is directly transferred to a frequency output. It also reports on the transducer, which uses two contact probes for transmitting the displacement to a non-contact sensing element. Experimental results demonstrate the stability, linearity, measurement range and accuracy of the sensor system. (C) 1999 Elsevier Science Ltd. All rights reserved.