Osamu Tabata: "3D Fabrication By Moving Mask Deep X-ray Lithography (M^2DXL) with Multiple Stages"The 15th Annual Int. Conf. On Micro Electro Mechanical Systems. 180-183 (2002)
Osamu Tabata: "3D Fabrication By Moving Mask Deep X-ray Lithography (M^2DXL) with Multiple Stages"The 15th Annual Int. Conf. On Micro Electro Mechanical Systems. 180-183 (2002)
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Osamu Tabata：“3D Fabrication By Moving Mask Deep X-ray Lithography (M^2DXL) with Multiple Stages”第 15 届年度 Int.
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