Development of surface gradient integrated profiler-Precise coordinate determination of normal vector measured points by self-calibration method and new data analysis from normal vector tosurface profile-
Development of surface gradient integrated profiler-Precise coordinate determination of normal vector measured points by self-calibration method and new data analysis from normal vector tosurface profile-
复制标题
表面梯度综合轮廓仪的开发-通过自校准方法精确确定法向矢量测量点的坐标以及从法向矢量到表面轮廓的新数据分析-
DOI：
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发表时间：
2009
期刊：
影响因子：
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通讯作者：
K.Endo
中科院分区：
文献类型：
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作者：
T.Ueno;S.Tachibanada;Y.Higashi;K.Endo
