Surface Passivation of Crystalline Silicon by Heat Treatment in Liquid Water and Its Application to Improve the Interface Properties of Metal-Oxide-Semiconductor Structures
Surface Passivation of Crystalline Silicon by Heat Treatment in Liquid Water and Its Application to Improve the Interface Properties of Metal-Oxide-Semiconductor Structures
复制标题
液态水中热处理晶体硅表面钝化及其在改善金属-氧化物-半导体结构界面性能中的应用
DOI：
--
复制
发表时间：
2018
期刊：
影响因子：
--
通讯作者：
Toshiyuki Sameshima
中科院分区：
文献类型：
--
作者：
T. Sameshima;M. Hasumi;T. Mizuno;T. Miyazaki;T. Uehara;Toshiyuki Sameshima;Toshiyuki Sameshima;Masahiko Hasumi;Toshiyuki Sameshima
