Surface treatment of polyimide substrates for the transfer and multitransfer of graphene films
Surface treatment of polyimide substrates for the transfer and multitransfer of graphene films
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DOI：
10.1016/j.apsusc.2015.04.201
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发表时间：
2015-09-15
影响因子：
6.7
通讯作者：
Gomez, David
中科院分区：
文献类型：
--
作者：
Campos, Nuria;Perez-Mas, Ana M.;Gomez, David
这项工作探讨了使用聚酰亚胺基板开发柔性石墨烯基器件。通过化学气相沉积合成单层石墨烯，并将其转移到未经处理和经处理的聚酰亚胺基底上。在四种不同的表面处理中，四氟甲烷/氧等离子体，特别是盐酸浴处理显示出最好的性能，因为它们将石墨烯样品的电阻率降低了多达46%。同时，由于重复转移过程多达四次，石墨烯覆盖面积增加，电阻率也降低了96%。HCl处理和转移迭代的结合使样品获得了800 Omega/sq的薄层电阻。据我们所知，这是文献中报道的常规柔性聚合物基底上的石墨烯样品的最低值，特别是聚酰亚胺，柔性应用中最广泛使用的材料。这一结果对石墨烯基柔性器件的开发做出了重大贡献。(C)2015爱思唯尔B. V.保留所有权利。
This work explores the use of polyimide substrates for the development of flexible graphene-based devices. Single layer graphene was synthesized by chemical vapour deposition and transferred to untreated and treated polyimide substrates. Of the four different surface treatments, the tetrafluoromethane/oxygen plasma and, especially, hydrochloric acid bath treatments showed the best performance, as they reduced the resistivity of the graphene samples by as much as 46%. At the same time, resistivity was also reduced by as much as 96% due to the increase in the graphene coverage area as a result of repeating the transfer process up to four times. The combination of HCl treatment and transfer iteration led to the samples acquiring a sheet resistance of 800 Omega/sq. To the best of our knowledge, this is the lowest value ever reported in the literature for graphene samples on conventional flexible polymeric substrates and, in particular, in polyimide, the most widely used material for flexible applications. This result represents a major contribution to the development of graphene-based flexible devices. (C) 2015 Elsevier B.V. All rights reserved.