A nodal analysis method for simulating the behavior of electrothermal microactuators
A nodal analysis method for simulating the behavior of electrothermal microactuators
复制标题
模拟电热微执行器行为的节点分析方法
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
Wei
中科院分区：
文献类型：
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作者：
Rengang Li;Qing‐An Huang;Wei
提出了一种利用节点分析方法对表面微机械电热微致动器进行验证和优化的新方法。机械和静电器件的节点分析方法是一种基于原理图的方法，大大简化了MEMS器件的设计。由于表面微机械电热微致动器在相对较低的输入电压下提供了较大的作用力，因此在各个领域得到了广泛的应用。这些电热微致动器也可以分解为梁和锚的基本元件。提出了电热式微致动器的节点分析方法。给出了多晶硅梁的导热系数、电阻率和热膨胀系数随温度变化的特性。同时还考虑了横向挠度和较大轴向应力对梁的有效轴向长度的影响。用有限元分析软件对该方法进行了验证，仿真数据吻合较好。将一般的节点分析方法推广到电热式微执行器的仿真。
This paper presents a novel approach to verify and optimize surface micromachined electrothermal microactuators by using a nodal analysis method. The nodal analysis method for the mechanical and electrostatic devices is a schematic-based method which simplifies the design of MEMS devices significantly. A variety of the surface micromachined electrothermal microactuators have been widely applied in various areas due to the high force provided at a relatively low input voltage. These electrothermal microactuators can also be decomposed into essential elements of beams and anchors. This paper presents the nodal analysis method for the electrothermal microactuators. The temperature dependent properties for the thermal conductivity, electrical resistivity and thermal expansion coefficient of polysilicon beams are included. The effect of the effective axial length for the beams due to lateral deflection and large axial stress is also taken into account. This approach is verified by ANSYS and the simulation data agrees well with each other. It extends the general nodal analyses method to simulate the electrothermal microactuators.