Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial light modulator.
Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial light modulator.
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DOI:
10.1364/ao.46.005917
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发表时间:
2007-08
期刊:
影响因子:
1.9
通讯作者:
Hidetomo Takahashi;S. Hasegawa;Y. Hayasaki
中科院分区:
文献类型:
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作者:
Hidetomo Takahashi;S. Hasegawa;Y. Hayasaki
Holographic femtosecond laser processing performs high-speed parallel processing using a computer-generated hologram (CGH) displayed on a liquid crystal spatial light modulator. A critical issue is to precisely control the intensities of the diffraction peaks of the CGH. We propose a method of compensating for the spatial frequency response in the design of CGH using the optimal-rotation-angle method. By applying the proposed method, the uniformity of the diffraction peaks was improved. We demonstrate holographic femtosecond laser processing with two-dimensional and three-dimensional parallelism.