Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial light modulator.

Holographic femtosecond laser processing using optimal-rotation-angle method with compensation of spatial frequency response of liquid crystal spatial light modulator.
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DOI:
10.1364/ao.46.005917
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发表时间:
2007-08
期刊:
影响因子:
1.9
通讯作者:
Hidetomo Takahashi;S. Hasegawa;Y. Hayasaki
Hidetomo Takahashi;S. Hasegawa;Y. Hayasaki
中科院分区:
工程技术4区
文献类型:
--
作者:
Hidetomo Takahashi;S. Hasegawa;Y. Hayasaki

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全息飞秒激光加工使用显示在液晶空间光调制器上的计算机生成的全息图(CGH)来执行高速并行加工。一个关键的问题是精确控制的衍射峰的强度的计算全息图。本文提出了一种用最佳转角法设计计算全息图时补偿空间频率响应的方法。通过应用该方法,提高了衍射峰的均匀性。我们展示了具有二维和三维平行性的全息飞秒激光加工。
Holographic femtosecond laser processing performs high-speed parallel processing using a computer-generated hologram (CGH) displayed on a liquid crystal spatial light modulator. A critical issue is to precisely control the intensities of the diffraction peaks of the CGH. We propose a method of compensating for the spatial frequency response in the design of CGH using the optimal-rotation-angle method. By applying the proposed method, the uniformity of the diffraction peaks was improved. We demonstrate holographic femtosecond laser processing with two-dimensional and three-dimensional parallelism.