Stable Extended Imaging Area Sensing Without Mechanical Movement Based on Spatial Frequency Multiplexing
Stable Extended Imaging Area Sensing Without Mechanical Movement Based on Spatial Frequency Multiplexing
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DOI：
10.1109/tie.2018.2803721
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发表时间：
2018-02
影响因子：
7.7
通讯作者：
Behnam Tayebi;F. Sharif;A. Karimi;Jae‐Ho Han
中科院分区：
文献类型：
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作者：
Behnam Tayebi;F. Sharif;A. Karimi;Jae‐Ho Han
工业轮廓检测过程依赖于三维物体在空间和时间域上的高灵敏度表征。普通的3-D测量仪器在时间域扫描图像区域，因此，这些技术的时间稳定性较低，特别是在工业和生物医学传感方面。我们提出了一种新型的无扫描扩展图像仪，它使用固定的光学参数，如分辨率，无需机械运动的干涉技术来传感三维显微物体的面积。该技术可以加快工业故障检测的控制过程，并能在较短的时间内获得生物样品的图像。首先，介绍了一种稳定的图像面积加倍系统。其次，介绍了二维采样方案的基本原理，在亚采样频率下使用双多路复用技术记录最大图像面积。此外，还提出了一个标准因子作为优值系数来确定准确的图像面积增强。最后，通过对反射和透明物体的传感，证明了该技术的可行性，其成像面积高达使用正方形方案的单全息记录的4.3倍。此外，还实时演示了对光刻过程的无扫描监控。厚度的标准偏差为0.48 nm，表明该技术具有亚纳米级的时间灵敏度。
Testing process in industrial profiling depends on the characterization of three-dimensional (3-D) objects with high sensitivity in spatial and temporal domains. Ordinary 3-D measurement instruments scan the image area in the temporal domain; therefore, these techniques experience low temporal stability especially for industrial and biomedical sensing. We propose a novel scan-free extended image instrument for sensing the area of 3-D microscopic objects using an interferometric technique with fixed optical parameters, such as resolution, and without mechanical movement. The technique could accelerate the control process in industrial fault detection and images of biological samples could be obtained in a shorter time. First, a stable system for doubling the image area is introduced. Second, the principles underlying the two-dimensional sampling scheme are introduced to record the maximum image area using a dual multiplexing technique at subsampling frequency. Moreover, a standard factor is presented as a figure of merit to determine the exact image area enhancement. Finally, the feasibility of this technique was demonstrated by sensing reflective and transparent objects with image area of up to 4.3-times that of a single-hologram recording using the square scheme. Furthermore, scan-free monitoring of the photolithography process was demonstrated in real-time. The standard deviation of thickness is 0.48 nm, which demonstrates the subnanometer temporal sensitivity of this technique.