Development of a Novel Process Chain Based on Atomic Force Microscopy Scratching for Small and Medium Series Production of Polymer Nanostructured Components
Development of a Novel Process Chain Based on Atomic Force Microscopy Scratching for Small and Medium Series Production of Polymer Nanostructured Components
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DOI：
10.1115/1.4001481
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发表时间：
2010-06
影响因子：
4
通讯作者：
E. Brousseau;F. Krohs;E. Caillaud;S. Dimov;O. Gibaru;S. Fatikow
中科院分区：
文献类型：
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作者：
E. Brousseau;F. Krohs;E. Caillaud;S. Dimov;O. Gibaru;S. Fatikow
在广泛的材料中生产新型微米和纳米结构器件和组件的持续趋势是推动微纳米制造领域研究开发创新工艺链的主要动力因素。其中一些链通过创新性地结合并同时优化母版制作和复制技术，使聚合物材料中的微米和纳米结构部件的系列生产成为可能。为了产生纳米级的特征，目前通常采用的母版制作工艺依赖于复杂的基于光刻的图案转移和/或基于束的直写工艺。不幸的是，执行这些技术所需的设备通常是资本密集型的，并且需要特定的操作温度或真空条件。同时，在新的或改进的纳米技术产品的开发阶段，快速生产聚合物原型以测试具有纳米级特征的组件的功能是有益的。因此，目前可用于纳米结构化复制母版的技术不符合通常与用于原型制作目的的小批量组件的生产相关联的低成本要求。因此，这可能会限制具有纳米级功能特征的产品的成功开发。在这项研究中，提出了一种新的工艺链，用于在聚合物中制造纳米结构组件，该工艺链依赖于简单且具有成本效益的母版制造技术。特别地，原子力显微镜刮擦被用作用于微注射成型的纳米结构化复制母版的替代技术。进行的实验研究表明，这种方法的潜力，在热塑性材料的纳米结构的设备的小型和中型系列生产。此外，采用实验设计方法分析了不同划痕参数对图案化结构可实现的表面粗糙度和深度的影响。
The continuing trend for producing novel micro- and nanostructured devices and components in a broad range of materials is a major motivating factor driving the research in the micro- and nanomanufacturing sector toward developing innovative process chains. Some of such chains enable the serial production of micro- and nanostructured parts in polymer material by combining innovatively and optimizing simultaneously master making and replication technologies. For producing features at the nanoscale, the master making processes that are currently commonly employed rely on complex lithography-based pattern transfers and/or on beam-based direct write processes. Unfortunately, the required equipment to perform these techniques are often capital intensive and necessitate particular operating temperatures or vacuum conditions. At the same time, during the development phase of new or improved nanotechnology-enabled products, it is beneficial to produce rapidly polymer prototypes to test the functionality of components with nanoscale features. Thus, the technologies currently available for nanostructuring replication masters do not comply with the low cost requirements typically associated with the production of small batches of components for prototyping purposes. As a result, this could restrict the successful development of products with functional features at the nanoscale. In this research, a new process chain is presented for the fabrication of nanostructured components in polymer that relies on a simple and cost-effective master making technology. In particular, atomic force microscopy scratching is employed as an alternative technique for nanostructuring replication masters for microinjection molding. The conducted experimental study demonstrated the potential of this approach for small and medium series production of nanostructured devices in thermoplastic materials. In addition, the effects of different scratching parameters on the achievable surface roughness and depth of the patterned structures were analyzed by employing the design of experiments approach.