Direct Phase Measurement of the X-Ray Specular Reflection Using Modulation under the Bragg Condition
Direct Phase Measurement of the X-Ray Specular Reflection Using Modulation under the Bragg Condition
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布拉格条件下X射线镜面反射调制的直接相位测量
DOI：
10.1143/jjap.41.l592
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发表时间：
2002
影响因子：
1.5
通讯作者：
Toshio Takahashi
中科院分区：
文献类型：
--
作者：
W. Yashiro;K. Shimizu;K. Hirano;Toshio Takahashi
提出了一种利用布拉格反射引起的强度调制来确定X射线镜面反射相位的方法。该方法被应用于Si（001）单晶覆盖一层自然氧化物几纳米厚。在所谓的（+，-）平行排列中进行在113布拉格反射的激发下沿00棒（镜面反射）的强度的沿着测量，并且观察到镜面反射的强度调制。从自然氧化物层的镜面反射的相位直接从实验获得的调制分布确定。
A method for determining the phase of the X-ray specular reflection using the intensity modulation caused by a Bragg reflection is proposed. The method was applied to a Si(001) single crystal covered with a layer of native oxide a few nanometers thick. Measurement of intensity along the 00 rod (specular reflection) under excitation of the 113 Bragg reflection was carried out in the so-called (+,-) parallel arrangement, and intensity modulation of the specular reflection was observed. The phase of the specular reflection from the layer of native oxide was directly determined from the experimentally obtained modulation profile.