A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity
A langasite surface acoustic wave wide-range temperature sensor with excellent linearity and high sensitivity
复制标题
具有优异线性度和高灵敏度的硅锰矿表面声波宽量程温度传感器
DOI：
10.1063/5.0036554
复制
发表时间：
2021-01-01
期刊：
影响因子：
1.6
通讯作者：
Luo, Jikui
中科院分区：
文献类型：
--
作者：
Xu, Hongsheng;Jin, Hao;Luo, Jikui
朗加石(LGS)表面声波(SAW)温度传感器具有较大的二阶频率温度系数，这导致其在较宽的温度范围内具有非线性和非单调响应，对于特定的传感器响应，可能会使测量的温度不是唯一的。在此，我们提出了一种在较宽温度范围内具有线性频率-温度特性的高温铂/硫化物声表面波传感器，该传感器是在低温金属氧化物(0°，138.5°，72°)衬底上制作的。该传感器具有单声学模式，但具有类似的二阶和三阶温度灵敏度的双共振，用于通过差分法实现线性频率-温度响应。测量的传感器输出(Δfm21)与温度在−60 °C到700 °C范围内呈线性关系，与理论分析一致。该传感器在整个温度范围内的灵敏度高达−167ppm/K。所有结果都显示了该传感器在恶劣环境中进行广泛温度监测的令人振奋的前景。
Langasite (LGS) surface acoustic wave (SAW) temperature sensors have a large second order temperature coefficient of frequency, which leads to their non-linear and non-monotonic responses in a wide temperature range and possibly makes the measured temperatures non-unique for a specific sensor response. Here, we propose a high-temperature Pt/LGS SAW sensor with linear frequency–temperature behavior in a wide temperature range, which was fabricated on a LGS (0°, 138.5°, 72°) substrate. The sensor has a single acoustic mode, but dual resonances with similar second- and third-order temperature sensitivities that were utilized for achieving a linear frequency–temperature response by a method of difference. A linear relationship between the measured sensor output (Δfm21) and temperature was obtained in the range of −60 °C to 700 °C, consistent with the theoretical analysis. The sensor has a high sensitivity of −167 ppm/K for the whole temperature range. All the results demonstrated exciting prospects of the sensor for wide temperature monitoring in harsh environments.