Dependence of laser parameter on conversion efficiency in high-repetition-rate laser-ablation-discharge EUV source
Dependence of laser parameter on conversion efficiency in high-repetition-rate laser-ablation-discharge EUV source
复制标题
高重复率激光烧蚀放电 EUV 光源中激光参数对转换效率的依赖性
DOI：
--
复制
发表时间：
2009
期刊：
影响因子：
--
通讯作者：
K. Hotta
中科院分区：
文献类型：
--
作者：
Y. Teramoto;T. Yokoyama;H. Mizokoshi;Hiroto Sato;K. Hotta
在国家发展组织和成员公司的支持下，欧盟志愿人员协会正在开展两个项目：私人项目和国家项目。该私人项目负责源模块的功率改进，目标是实现115-W原型。该国家项目涵盖了收集器模块上的广泛遗留问题，以实现足够的可靠性。在私人项目中，激光烧蚀放电产生等离子体（LADPP）正在研究作为高功率EUV源的候选者。LADPP具有长寿命、高收集效率和高热输入等迷人的特性。由于LADPP的血浆体积小，其收集效率可达15%以上.脉冲重复频率达到20 kHz，输出功率达到580 W/2πsr。为了提高转换效率（CE），对LADPP进行了详细的诊断。特别地，从实验中导出了CE与激光脉冲宽度的关系。结果，了解了LADPP的动态特性，并了解了增加CE和提高频率可伸缩性的解决方案。基础实验预测CE可以提高60%。
Two projects are being conducted in EUVA under the support of NEDO and member companies; private project and national project. The private project is responsible for power improvement of a source module targeting realization of 115-W prototype. The national project covers wide area of remaining issues on a collector module to achieve sufficient reliability. In the private project, a laser-ablation-discharge-produced plasma (LADPP) is being researched as a candidate of high-power EUV source. LADPP has fascinating properties such as long lifetime, high collection efficiency, and high thermal input. More than 15 % of collection efficiency could be obtained with LADPP because of its small plasma size. Pulse repetition frequency has reached 20 kHz and 580 W/2πsr were achieved so far. In order to increase conversion efficiency (CE), detailed diagnostics of LADPP were carried out. Especially, dependence of CE on laser pulse duration is derived from the experiment. As a result, dynamics of LADPP was understood and solution to increase CE and improve frequency scalability was understood. A fundamental experiment predicted that CE can be increased 60 %.