Precisely tuned emission from porous silicon vertical optical cavity in the visible region
Precisely tuned emission from porous silicon vertical optical cavity in the visible region
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在可见光区域从多孔硅垂直光学腔精确调谐发射
DOI：
10.1063/1.363526
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发表时间：
1996
期刊：
影响因子：
--
通讯作者：
N. Koshida
中科院分区：
文献类型：
--
作者：
M. Araki;H. Koyama;N. Koshida
多孔硅（PS）腔的工作峰值能量可以完全控制在1.5-2.2 eV的宽范围内，使用基于PS的法布里-珀罗谐振器，该谐振器由发光有源PS层和两个高反射率镜组成。当PS器件被紫外激光激发时，观察到非常窄的光谱（半峰全宽为10-40 meV），没有任何明显的侧模迹象。通过改变阳极氧化参数，可以精确连续地调节中心光子能量。控制器件运行的关键问题是将有源PS层的光学厚度调整到适当的值和具有高反射率的四分之一波长多层PS反射镜的制造。在简化模型的基础上，通过理论分析讨论了发射光的光谱性质。这些结果表明，PS器件作为锐带通光学滤波器工作，并且PS材料可用于新型硅基微光子学。
The operating peak energy of a porous silicon (PS) cavity can be completely controlled over a wide range of 1.5–2.2 eV, using a PS‐based Fabry–Perot resonator composed of a light‐emitting active PS layer and two high‐reflectivity mirrors. When the PS devices are excited by a uv laser, quite narrow spectra (10–40 meV in full width at half‐maximum) are observed without any significant signs of side mode. The central photon energy is precisely and continuously tuned simply by changing the anodization parameters. The key issues of the controlled device operation are adjustment of the optical thickness of the active PS layer to an appropriate value and fabrication of the quarter‐wavelength multilayered PS mirror with a high reflectivity. The spectral qualities of the emitted light are also discussed by theoretical analyses on the basis of a simplified model. These results suggest that the PS devices operate as sharp band‐pass optical filter and the PS materials are available for novel silicon‐based microphotonics.