Growth of nanocrystalline diamond protective coatings on quartz glass
Growth of nanocrystalline diamond protective coatings on quartz glass
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DOI：
10.1063/1.1479476
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发表时间：
2002-05
影响因子：
3.2
通讯作者：
W. B. Yang;F. Lü;Z. Cao
中科院分区：
文献类型：
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作者：
W. B. Yang;F. Lü;Z. Cao
采用氢气和甲烷微波等离子体增强化学气相沉积法在石英玻璃衬底上生长了晶粒尺寸控制在70 nm以下的透明金刚石薄膜。采用一套互补的分析工具来研究沉积物的微观结构、光学和机械性能。透射电子显微镜显示的成核密度一般大于1011/cm 2，这是相同的数量级的预处理的基板表面上的点状缺陷。沉积物的维氏硬度在61 ~ 95 GPa之间。当膜厚为1.0 μm，表面粗糙度小于10 nm时，可见光区的最佳透过率为65%，可以满足光学元件透明保护膜的要求。
Transparent diamond films with a crystallite size well controlled below 70 nm were grown by hydrogen and methane microwave plasma-enhanced chemical vapor deposition on quartz glass substrates, which had been scratched with 0.5 μm diamond powder. A complementary set of analyzing tools was employed to study the microstructure, the optical and mechanical properties of the deposits. Transmission electron microscopy revealed a nucleation density generally larger than 1011/cm2, which is of the same order of magnitude as the spotlike defects on the pretreated surface of the substrates. The Vicker’s hardness of the deposits scatters between 61 and 95 GPa. An optimal transmittance of 65% in the visible light range is achieved in coatings of 1.0 μm in thickness when the surface roughness measures about 10 nm or less. The nanocrystalline diamond films thus prepared can meet the requirements on transparent protective coatings for optical components.