Polymer Hybrid Plasmonic Waveguides and Microring Resonators
Polymer Hybrid Plasmonic Waveguides and Microring Resonators
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DOI：
10.1109/lpt.2011.2159784
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发表时间：
2011-09-01
影响因子：
2.6
通讯作者：
Van, Vien
中科院分区：
文献类型：
--
作者：
Horvath, Cameron;Bachman, Daniel;Van, Vien
我们报道了基于金/二氧化硅/ SU - 8材料体系的混合等离子体波导的设计与制作。将这些器件与同一芯片上的介电SU - 8波导进行单片集成，使得能够实现光子器件和等离子体器件之间高效且宽带的耦合。还展示了紧凑的混合等离子体微环谐振器，其固有品质因数接近300。
We report the design and fabrication of hybrid plasmonic waveguides based on the Au/SiO(2)/SU-8 material system. Monolithic integration of these devices with dielectric SU-8 waveguides on the same chip enabled efficient and broadband coupling between photonic and plasmonic devices to be achieved. Compact hybrid plasmonic microring resonators were also demonstrated with high intrinsic Q-factors close to 300.