Solid-state dewetting of Au/Ni bilayers: The effect of alloying on morphology evolution
Solid-state dewetting of Au/Ni bilayers: The effect of alloying on morphology evolution
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DOI：
10.1063/1.4891448
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发表时间：
2014-07-28
影响因子：
3.2
通讯作者：
Schaaf, P.
中科院分区：
文献类型：
--
作者：
Herz, A.;Wang, D.;Schaaf, P.
研究了沉积在SiO_2/Si衬底上的Au/Ni双层膜的固相去湿过程。快速热处理被用来通过升高温度来诱导去湿过程。X射线衍射峰(111)的演化揭示了由于Au和Ni的混合而产生的特征变化。在低温下，Au-Ni薄膜在相界处破裂，生长中的空洞被富镍相包围。观察到了树枝状空穴的生长。随着温度的升高，Au-Ni固溶体的形成远远高于Au和Ni的体相平衡溶解度。研究发现，这种亚稳相的形成使Au-Ni薄膜不易破裂。此外，由于合金化，仍在演化的空洞的生长模式转变为更规则的、多面化的生长模式。结果表明，在混溶间隙以上的热处理通过脱湿形成了过饱和的、取向良好的Au-Ni固溶体团聚。(C)2014 AIP出版有限责任公司。
The solid-state dewetting of thin Au/Ni bilayers deposited onto SiO2/Si substrates is investigated. A rapid thermal treatment is used to induce the dewetting process by an increase in temperature. The evolution of the (111) peaks of X-ray diffraction reveals a characteristic change due to mixing of Au and Ni. At low temperature, the Au-Ni thin film is found to break up at the phase boundaries and growing voids are shown to be surrounded by a Ni-rich phase. Branch-like void growth is observed. Upon annealing at increasing temperatures, Au-Ni solid solutions are formed well above the bulk equilibrium solubility of Au and Ni. It is found that this metastable phase formation makes the Au-Ni thin film less vulnerable to rupturing. Moreover, growth mode of still evolving voids changes into a more regular, faceted one due to alloying. Finally, it is shown that annealing above the miscibility gap forms supersaturated, well-oriented Au-Ni solid solution agglomerates via dewetting. (C) 2014 AIP Publishing LLC.