Low-loss optical waveguides and Y-branch splitters in lithium niobate fabricated by MeV oxygen ions with low dose.
Low-loss optical waveguides and Y-branch splitters in lithium niobate fabricated by MeV oxygen ions with low dose.
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DOI：
10.1364/oe.20.021114
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发表时间：
2012-09
期刊：
影响因子：
3.8
通讯作者：
Huiying Hu;F. Lu;Xue-Lin Wang;Feng Chen;Ke Wang
中科院分区：
文献类型：
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作者：
Huiying Hu;F. Lu;Xue-Lin Wang;Feng Chen;Ke Wang
采用多能低剂量离子注入技术和累积退火工艺制备了损耗低至0.17dB/cm的LiNbO(3)衬底单模光波导。介绍了一种波导y分支分路器。基于离子注入引起的损伤分布描述了波导中的折射率分布，并模拟了波导中的传播特性。仿真结果与实测结果吻合较好。
Single-mode optical waveguides in LiNbO(3) substrate with loss as low as 0.17dB/cm were fabricated by a multi-energy low-dose ion implantation technology and cumulative annealing treatment. A waveguide Y-Branch splitter was demonstrated. Index profile in waveguide is described based on the ion implantation-induced damage profile, and propagation property in waveguide is simulated. Simulation results show a good consistence with the measured ones.