Effect of deposition pressure on the properties of DLC coatings deposited by bipolar‐type PBII&D
Effect of deposition pressure on the properties of DLC coatings deposited by bipolar‐type PBII&D
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DOI：
10.1002/sia.2707
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发表时间：
2008-03
影响因子：
1.7
通讯作者：
Junho Choi;S. Nakao;M. Ikeyama;Takahisa Kato
中科院分区：
文献类型：
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作者：
Junho Choi;S. Nakao;M. Ikeyama;Takahisa Kato
在本研究中，沉积压力对类金刚石碳（DLC）涂层的沉积速率和各种性能的影响进行了研究。使用双极型基于等离子体的离子注入和沉积（PBIID）技术在Si衬底上沉积DLC涂层。使用甲苯作为源气体，并且沉积压力在0.03至2.0Pa的范围内。当沉积压力从0.03 Pa增加到2.0 Pa时，DLC膜的沉积速率增加了约12倍。此外，由于高沉积速率，表面粗糙度随着沉积压力的增加而增加。当沉积压力超过0.7Pa时，由于石墨岛的显著生长，硬度和弹性模量下降。在2.0 Pa下沉积的DLC涂层的耐蚀性能上级在0.2 Pa下沉积相同沉积时间1h的DLC涂层。DLC膜的高沉积压力可有效提高其防腐蚀性能。版权所有© 2008约翰威利父子有限公司。
In the present study, the effect of deposition pressure on the deposition rate and various properties of diamond‐like carbon (DLC) coatings were investigated. The DLC coatings were deposited on Si substrates using a bipolar‐type plasma‐based ion implantation and deposition plasma based ion implantation and deposition (PBIID) technique. The toluene was used as a source gas and the deposition pressure ranged from 0.03 to 2.0 Pa. The deposition rate of the DLC coatings increases about 12 times as the deposition pressure is changed from 0.03 to 2.0 Pa. Also, the surface roughness increases with increasing deposition pressure due to high deposition rate. The hardness and elastic modulus decrease when the deposition pressure exceed 0.7 Pa due to the remarkable growth of graphitic islands. The corrosion protection performance of the DLC coating deposited at 2.0 Pa is superior to that of the DLC coating deposited at 0.2 Pa for the same deposition time of 1 h. The high deposition pressure for the DLC coating is effective in improvement of corrosion protection properties. Copyright © 2008 John Wiley & Sons, Ltd.