Fabrication and Field Emission Properties of Diamond-Like Carbon Nanostructure Arrays Deposited by Filtered Cathodic Vacuum Arc
Fabrication and Field Emission Properties of Diamond-Like Carbon Nanostructure Arrays Deposited by Filtered Cathodic Vacuum Arc
复制标题
过滤阴极真空电弧沉积类金刚石碳纳米结构阵列的制备及其场发射性能
DOI：
10.1002/ppap.201600023
复制
发表时间：
2016
影响因子：
3.5
通讯作者：
Zhang Gengmin
中科院分区：
文献类型：
--
作者：
Li Yunhui;Yan Xueqing;Yang Jin;Zhang Gengmin
采用过滤阴极真空弧(FCVA)在室温下沉积了类金刚石(DLC)薄膜。利用多孔阳极氧化铝(AAO)模板构建了排列良好的类金刚石纳米纤维阵列。随着模板刻蚀的缓慢进行，DLC纳米纤维逐渐弯曲并紧密编织成掩膜，防止AAO完全溶解在刻蚀溶液中。利用高电场下电荷积累的作用，去除DLC/AAO纳米结构的抗蚀剂掩膜，形成DLC纳米晶须阵列。类金刚石纳米阵列的电子场发射特性表明，其开启电场为1.60 V 微米−1，阈值电场为2.98 V 微米−1。这些类金刚石纳米晶须阵列显示出组装碳基真空微电子器件的高潜力。
Diamond‐like carbon (DLC) films are deposited by filtered cathodic vacuum arc (FCVA) at room temperature. Well‐aligned DLC nanofiber arrays are structured using porous anodic aluminum oxide (AAO) templates. Along with a slow process of template etching, the DLC nanofibers gradually bend over and closely weave into a mask, preventing the AAO from entirely dissolving into the etching solution. This resist‐mask of DLC/AAO nanostructure is removed by the effect of electric charge accumulation at a high electric field and then the DLC nano‐whisker array is formed. The electron field emission (EFE) properties of DLC nanoarrays indicate a low turn‐on field of 1.60 V µm−1and a threshold field of 2.98 V µm−1. These DLC nanowhisker arrays signify a high potential for assembling carbon‐based vacuum microelectronic devices.