Biosensors based on flexural mode piezo-diaphragm
Biosensors based on flexural mode piezo-diaphragm
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DOI：
10.1109/nems.2008.4484355
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发表时间：
2008-04
期刊：
影响因子：
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通讯作者：
Zhihong Wang;J. Miao;Ting Xu;Ling Yu;Chang Ming Li;Xiaofeng Chen
中科院分区：
文献类型：
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作者：
Zhihong Wang;J. Miao;Ting Xu;Ling Yu;Chang Ming Li;Xiaofeng Chen
本文提出了一种利用微机械压电微膜片弯曲振动模式的质量敏感生物传感器。研究了膜片的质量灵敏度与振型的关系。理论分析表明，对于相同的多层膜结构，质量灵敏度主要取决于膜片的单位面积质量，弯曲模式传感器可以工作在比厚度模式更低的工作频率，而不会损失其质量灵敏度，约为QCM的30倍。已研制出Q值大于200的生物传感器，其共振频率低至120 kHz。已检测到传感器表面捕获的山羊免疫球蛋白的响应频移。这些结果表明，弯曲模式微机械膜片有可能替代低成本的QCM生物传感器。
This paper presents a mass sensitive biosensor utilizing a flexural vibration mode of a micromachined piezoelectric micro-diaphragm. The mass sensitivity of the diaphragm has been investigated with respect to the vibration modes. Theoretical analysis reveals that, for the same multilayer structure, the mass sensitivity is mainly determined by the mass per unit area of the diaphragm, the flexural mode sensor can work at a lower operating frequency than thickness mode without losing its mass sensitivity-about 30 times higher than that of a QCM. A biosensor with Q value of more than 200 has been demonstrated at a resonant frequency of as low as 120 kHz. Frequency shift in response to captured goat IgG on sensor surface has been detected. These results indicate that the flexural mode micromachined diaphragm has a potential to be an alternative to the low-cost QCM biosensors.