Soft ferromagnetic thin films for high frequency applications
Soft ferromagnetic thin films for high frequency applications
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DOI：
10.1016/s0304-8853(01)01185-4
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发表时间：
2002-04-01
影响因子：
2.7
通讯作者：
Schüppen, A
中科院分区：
文献类型：
--
作者：
Fergen, I;Seemann, K;Schüppen, A
在这份报告中，描述了不同的非晶和纳米晶薄膜的制备和表征，特别是可能集成到标准半导体工艺中。所制备的非晶态FeCoBSi薄膜具有优异的高频性能。然而，它们在现有的制造工艺中的实施受到限制，因为薄膜在更高的热处理温度下开始结晶。软纳米晶薄膜，如FeTaN，能够克服这一温度限制，因为它们具有更好的热稳定性。(C)2002 Elsevier Science B.V.保留所有权利。
In this report the fabrication and characterization of different amorphous and nanocrystalline films with special respect to a possible integration into standard semiconductor processes is described. The prepared amorphous FeCoBSi films exhibit excellent high frequencies properties. However, their implementation in established fabrication processes is restricted, since the films start to crystallize at higher annealing temperatures. Soft nanocrystalline films, like FeTaN, are able to overcome this temperature limitation because of their better thermal stability. (C) 2002 Elsevier Science B.V. All rights reserved.