Precision optical metrology without lasers
Precision optical metrology without lasers
复制标题
无需激光的精密光学计量
DOI：
10.1117/12.2183451
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发表时间：
2015
期刊：
影响因子：
--
通讯作者：
C. Falldorf
中科院分区：
文献类型：
--
作者：
R. Bergmann;J. Burke;C. Falldorf
光学计量是精确和快速测量的关键技术，其分辨率可达微米甚至纳米级。具体光学计量技术的选择和结果的质量取决于样品参数，如尺寸、几何形状和表面粗糙度，以及用户要求，如分辨率、测量时间和稳健性。基于干涉测量的技术以其在纳米范围内的低测量不确定度而广为人知，但通常需要小心地隔离振动，并且出于眼睛安全的原因经常需要屏蔽激光光源。本文采用基于梯度的偏转测量技术和基于有限差分的剪切干涉测量技术，研究高精度的无激光光学测量技术。通过对偏转测量系统的仔细校准，可以研究几乎所有类型的反射面，包括测量不确定度低于μm的非球面或自由曲面。计算剪切干涉测量(COSI)使我们能够将干涉测量精度与使用廉价且对眼睛安全的低亮度光源(例如光纤耦合LED甚至液晶显示器)的可能性结合起来。我们使用COSI例如用于显微镜中的定量相衬成像。我们强调了这两种方法的优点，讨论了它们的传递函数，并给出了两种方法的精度结果。
Optical metrology is a key technique when it comes to precise and fast measurement with a resolution down to the micrometer or even nanometer regime. The choice of a particular optical metrology technique and the quality of results depends on sample parameters such as size, geometry and surface roughness as well as user requirements such as resolution, measurement time and robustness. Interferometry-based techniques are well known for their low measurement uncertainty in the nm range, but usually require careful isolation against vibration and a laser source that often needs shielding for reasons of eye-safety. In this paper, we concentrate on high precision optical metrology without lasers by using the gradient based measurement technique of deflectometry and the finite difference based technique of shear interferometry. Careful calibration of deflectometry systems allows one to investigate virtually all kinds of reflecting surfaces including aspheres or free-form surfaces with measurement uncertainties below the μm level. Computational Shear Interferometry (CoSI) allows us to combine interferometric accuracy and the possibility to use cheap and eye-safe low-brilliance light sources such as e.g. fiber coupled LEDs or even liquid crystal displays. We use CoSI e.g. for quantitative phase contrast imaging in microscopy. We highlight the advantages of both methods, discuss their transfer functions and present results on the precision of both techniques.
通过计算剪切干涉测量进行波场传感
DOI：
10.1364/josaa.30.001905
发表时间：
2013
期刊：
Journal of the Optical Society of America. A, Optics, image science, and vision
影响因子：
--
作者：
Falldorf;v. Kopylow;Bergmann
通讯作者：
Bergmann