Micro-phase measuring profilometry: Its sensitivity analysis and phase unwrapping

Micro-phase measuring profilometry: Its sensitivity analysis and phase unwrapping
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DOI:
10.1016/j.optlaseng.2015.03.018
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发表时间:
2015-09
影响因子:
4.6
通讯作者:
Suming Tang;Xu Zhang;Dawei Tu
Suming Tang;Xu Zhang;Dawei Tu
中科院分区:
工程技术2区
文献类型:
--
作者:
Suming Tang;Xu Zhang;Dawei Tu

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全局照明影响面形测量精度,相位解包裹是相位测量轮廓术中的一个重要问题。本文提出了一种微相位测量轮廓术,以减少全局照明的影响。与传统的微相移方法相比,该方法的相位误差水平更低。首先,结合微相位准则,提出了一种频率选择准则,用于相位测量轮廓术的频率设计。通过分析强度噪声引起的包裹相位的不确定性,得到了频率规律。然后,将相位解缠视为一个同余问题,并采用封闭形式的鲁棒中国剩余定理算法来确定对应关系。最后,在投影机-摄像机系统上进行了对比实验。实验结果表明,相位测量轮廓术可以有效地降低全局光照的影响,所提出的频率选择规则是有效的。此外,鲁棒中国剩余定理在解决相位误差方面的性能优于传统中国剩余定理。在满足频率选择原则的情况下,解缠精度接近100%。否则,性能会降低。
Global illumination affects shape measurement accuracy, and phase unwrapping is an important problem in phase measuring profilometry. In this paper, a micro-phase measuring profilometry is proposed to reduce the effects of global illumination. The wrapped phase error level of the proposed method is lower than that of the traditional micro-phase shifting method. First, a frequency selection rule is developed in combination with the micro-phase rule to design the frequencies of the proposed phase measuring profilometry. The frequency rule is obtained by analysing the uncertainty of the wrapped phase caused by intensity noise. Then, phase unwrapping is regarded as a congruence problem, and the closed-form robust Chinese remainder theorem algorithm is adopted to determine the correspondence. Finally, the comparative experiments are conducted on a projector-camera system. Experimental results show that the effects of global illumination can be effectively reduced with the proposed phase measuring profilometry, and the proposed frequency selection rule is valid. In addition, the performance of the robust Chinese remainder theorem in addressing the phase error is better than that of traditional Chinese remainder theorem. Furthermore, the unwrapping accuracy can nearly reach 100% if the frequency selection rule is satisfied. Otherwise, the performance degrades.