Dependence of confined plastic flow of polycrystalline Cu thin films on microstructure
Dependence of confined plastic flow of polycrystalline Cu thin films on microstructure
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多晶铜薄膜的受限塑性流动对微观结构的依赖性
DOI：
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发表时间：
2016
期刊：
影响因子：
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通讯作者：
W. Meng
中科院分区：
文献类型：
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作者：
Y. Mu;Xiaoman Zhang;J. Hutchinson;W. Meng
在微柱上进行轴向压缩，其中多晶铜薄膜夹在CrN和Si之间。当铜膜相对于柱轴倾斜90°或45°时，可以实现铜的塑性流动。通过改变生长铜膜的模板改变了铜膜的织构。沉积后退火进一步改变了铜的微观结构。在沉积状态下，流动应力对薄膜织构的依赖性很小。然而，退火对约束铜膜的流动应力有显著的影响。讨论了应变梯度塑性模型的意义。
Axial compression was conducted on micro-pillars, in which polycrystalline Cu thin films were sandwiched between CrN and Si. Plastic flow of Cu was achieved, when the Cu films are inclined either at 90° or 45° with respect to the pillar axis. The texture of Cu films was altered by changing the template on which film growth occurred. The Cu microstructure was further altered by post-deposition annealing. The flow stress shows little dependence on the film texture in the as-deposited state. However, annealing influences the flow stress of confined Cu films significantly. The implications on strain gradient plasticity models are discussed.