Extended-field electromagnetic model for inductively coupled plasma
Extended-field electromagnetic model for inductively coupled plasma
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DOI：
10.1088/0022-3727/34/12/321
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发表时间：
2001-06
期刊：
影响因子：
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通讯作者：
S. Xue;P. Proulx;M. Boulos
中科院分区：
文献类型：
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作者：
S. Xue;P. Proulx;M. Boulos
提出了一种扩展场（EF）二维（2D）感应耦合等离子体模型。通过将电磁场的计算域扩展到等离子体放电区之外，用较简单的远场边界条件代替了标准（ST）二维模型中的矢势边界条件。扩展模型收敛速度比标准配方，并在整个计算域产生一致的解决方案。使用商业代码“FLUENT”，用相应的连续性、动量和能量传递方程求解矢量势方程。矢量势方程的计算域扩展到感应线圈区域之外，而对于所有其他方程，计算仅限于等离子体约束管内的放电区域。计算结果与使用ST 2D模型得到的结果进行了比较。两种模型的结果之间的差异主要是在入口区域的流动，并接近感应线圈。为了验证EF模型，具有恒定电导率的负载被放置在线圈区域的中心，并将计算出的轴向磁场的径向分布与现有的解析解进行比较。结果在1%的不确定度内吻合良好。
An extended-field (EF), two dimensional (2D) model formulation is proposed for inductively coupled plasma. By extending the calculating domain of the electromagnetic (EM) field outside of the plasma discharge region, the boundary conditions of vector potential used by the standard (ST) 2D model are replaced by simpler far field boundary conditions. The extended model converges faster than the standard formulation and gives rise to consistent solutions throughout the computational domain. Vector potential equations are solved with corresponding continuity, momentum, and energy transfer equations using the commercial code `FLUENT'. The computational domain for vector potential equations are extended well beyond the induction coil region, while for all the other equations, computations are limited to the discharge region inside the plasma confinement tube. The computational results are compared with those obtained using the ST 2D model. The difference between the results of the two models is noted mostly in the entrance regions of the flow, and close to the induction coil. To validate the EF model, a load with constant electric conductivity is placed centrally in the coil region and the calculated radial profile of the axial magnetic field is compared with existing analytical solutions. The results are in good agreement within an uncertainty of 1%.