A Novel pH Microsensor with a Built-in Reference Electrode
A Novel pH Microsensor with a Built-in Reference Electrode
复制标题
一种内置参比电极的新型 pH 微传感器
DOI：
10.3938/jkps.43.769
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发表时间：
2003
影响因子：
0.6
通讯作者：
Chang
中科院分区：
文献类型：
--
作者：
Young;Young;B. Sohn;Jung;Chang
提出了一种新型的内置参比电极的pH微传感器，并论证了其实现微型参比电极与pH微传感器完全集成的可行性。铱氧化物电极和pH不敏感场效应晶体管分别用作pH传感器和参比电极。通过使用简单的制造工艺，在单片氧化铟锡涂覆的玻璃上形成氧化铱层和pH不敏感膜。申报器械的灵敏度为62.5 mV/pH，在0.8 mV/pH偏差范围内与估计值匹配良好。利用所提出的系统，可以规避传统差分测量系统中对参考场效应晶体管的严格电气要求。
A novel pH microsensor with a built-in reference electrode is proposed, and its feasibility is demonstrated to pursue a pH microsensor fully integrated with a miniaturized reference electrode. An iridium-oxide electrode and a pH-insensitive field-effect transistor are used as a pH sensor and a reference electrode, respectively. An Iiridium-oxide layer and a pH-insensitive membrane are formed on a single piece of indium-tin-oxide-coated glass by using the simple fabrication processes. The sensitivity of the proposed device is 62.5 mV/pH and matches well with the estimated value within a 0.8 mV/pH deviation. With the proposed system, the strict electrical requirements of a reference field-effect transistor in conventional differential measurement system can be circumvented.