Statistics-based electron Moire technique: a novel method applied to the characterization of mesoporous structures
Statistics-based electron Moire technique: a novel method applied to the characterization of mesoporous structures
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基于统计的电子莫尔技术：一种应用于介孔结构表征的新方法
作者：
Li Chuanwei;Liu Zhanwei;Xie Huimin;Wu Dan
本研究首次提出了一种基于介孔材料的电子莫尔条纹测量方法，科普了高畸变条纹的问题，实现了对无序介孔结构的测量。采用灰度共生矩阵来确定随机分布的莫尔条纹图案的主导周期和取向，从而获得测试结构的相应周期/取向。详细讨论了基本原理、方法描述和相关实验。利用该方法对介孔氧化铝薄膜进行了研究。
We report a statistics-based electron Moiré method in this study, for the first time, to cope with the highly distorted fringes and to realize the measurement of disordered mesoporous structures. A grey-level co-occurrence matrix is employed to determine the predominant period and the orientation of a randomly distributed Moiré fringe pattern and consequently to obtain the corresponding period/orientation of the test structures. The basic principles, the method descriptions, and the relevant experiments are discussed in detail. Mesoporous alumina films are investigated with the proposed method.