Growth and Transport in Nanostructured Materials: Reactive Transport in PVD, CVD, and ALD
Growth and Transport in Nanostructured Materials: Reactive Transport in PVD, CVD, and ALD
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纳米结构材料的生长和传输:PVD、CVD 和 ALD 中的反应传输
DOI:
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发表时间:
2017
期刊:
影响因子:
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通讯作者:
A. Yanguas
中科院分区:
文献类型:
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作者:
A. Yanguas
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