SMART: A planned ultrahigh-resolution spectromicroscope for BESSY II
SMART: A planned ultrahigh-resolution spectromicroscope for BESSY II
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DOI：
10.1016/s0368-2048(97)00016-9
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发表时间：
1997-03-01
影响因子：
1.9
通讯作者：
Benner, G
中科院分区：
文献类型：
--
作者：
Fink, R;Weiss, MR;Benner, G
一个新的超高真空光谱显微镜称为智能（光谱显微镜的所有相关技术）目前正在建设中的软X射线波荡器光束线在BESSY II。该仪器包括一个平面光栅单色仪与非球面聚焦镜和超高分辨率，低能量电子显微镜包含一个能量过滤器。它可用作各种电子光谱（XAS，XPS，UPS，XAES）的光电子显微镜，并具有优于1 nm的计算空间分辨率。校正的欧米茄滤波器将提供约0.1 eV的最大能量分辨率。高横向分辨率的电子显微镜将通过校正的物镜透镜的色差和球面像差的静电镜结合校正的磁束分离器的装置，一个额外的电子源放置在另一侧的束分离器相对的静电镜也将允许LEEM，MEM和小斑点LEED调查进行。本文概述了该仪器的基本思想、各种工作方式和电子光学设计。(C)1997年Elsevier Science B.V.
A new UHV spectromicroscope called SMART (spectromicroscope for all relevant techniques) is currently under construction for a soft X-ray undulator beamline at BESSY II. The instrument consists of a plane-grating monochromator with an aspherical focusing mirror and an ultrahigh-resolution, low-energy electron microscope containing an energy filter. It can be used as a photoemission microscope for a variety of electron spectroscopies (XAS, XPS, UPS, XAES) and has a calculated spatial resolution of better than 1 nm. A maximum energy resolution of about 0.1 eV will be provided by a corrected omega filter. The high lateral resolution of the electron microscope will be achieved through the correction of the chromatic and spherical aberrations of the objective lens by means of an electrostatic mirror in combination with a corrected magnetic beam separator, An additional electron source placed on the other side of the beam separator opposite the electrostatic mirror will also allow LEEM, MEM and small-spot LEED investigations to be carried out. The basic ideas, the various modes of operation and the electron optical design of the instrument are outlined. (C) 1997 Elsevier Science B.V.