Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film
Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film
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压电锆钛酸铅薄膜换能微悬臂梁的品质因数
DOI：
10.1007/s00542-006-0272-2
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发表时间：
2007
期刊：
影响因子：
--
通讯作者：
T. Mihara
中科院分区：
文献类型：
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作者：
Jian Lu;T. Ikehara;Takeshi Kobayashi;R. Maeda;T. Mihara
研究和讨论了大气压条件下压电锆钛酸铅（PZT）薄膜微悬臂梁的品质因数（Q因子）。结果表明，随着PZT薄膜厚度的增加，Q值增大。由于空气阻尼，较短的杠杆导致首选较大的Q因子。当使用1.04 μm厚的PZT薄膜作为机电转换介质时，对于150 μm长的PZT悬臂梁，Q值高达450。当使用集成PZT薄膜自激和外部PZT振子驱动时，测量的Q因子的差异表明，即使在大气压条件下，PZT薄膜中的机电耦合引起的能量耗散也是值得注意的。此外，PZT薄膜的机械性能被发现有助于显着降低的Q因子。
The quality factors (Q-factor) of micro cantilevers transduced by piezoelectric lead zirconate titanate (PZT) film under atmospheric pressure conditions were investigated and discussed. It was found thatQ-factors increased with thicker PZT film. Due to air damping, shorter cantilevers resulted in preferred largerQ-factors. TheQ-factor was found to be as high as 450 for a 150-μm long PZT cantilever when using 1.04-μm thick PZT film as the electromechanical conversion medium. Differences in the measuredQ-factors when using integrated PZT film self-excitation and external PZT vibrator actuation indicate that energy dissipation induced by the electromechanical coupling in PZT thin films was noteworthy even under atmospheric pressure conditions. Moreover, the mechanical properties of the PZT film were found contribute significantly to decreases of theQ-factor.