Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-situ Heating TEM Observation
Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-situ Heating TEM Observation
复制标题
通过原位加热 TEM 观察证明铝诱导结晶过程中多晶硅薄膜形成的直接证据
DOI：
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发表时间：
2008
期刊：
影响因子：
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通讯作者：
H. Nakashima and H. Nakashima
中科院分区：
文献类型：
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作者：
S. Ii;T. Hirota;K. Fujimoto;Y. Sugimoto;N. Takata;K. Ikeda;H. Nakashima and H. Nakashima
