Development of a tip enhanced near-field laser ablation system for sub-micrometric analysis of solid samples
Development of a tip enhanced near-field laser ablation system for sub-micrometric analysis of solid samples
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发表时间：
2020
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通讯作者：
Chirelle Jabbour;J. Lacour;M. Tabarant;A. Semerok;F. Chartier;J-L. Lacour;S. Fomichev;J. Moryousef;J. Simonnet
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作者：
Chirelle Jabbour;J. Lacour;M. Tabarant;A. Semerok;F. Chartier;J-L. Lacour;S. Fomichev;J. Moryousef;J. Simonnet
研究了激光波长（266 nm和532 nm）对针尖增强近场激光烧蚀导电金和半导体硅样品的影响。近场激光烧蚀效应是通过将纳秒Nd：YAG激光耦合到原子力显微镜获得的。实验在大气压下进行了一个和多个激光脉冲。近场烧蚀表明，根据激光波长和样品的性质的陨石坑的尺寸有明显的差异。在金样品上，使用相同数量的激光脉冲，在532 nm处获得更大的陨石坑，而陨石坑深度对于两种波长几乎保持不变。在硅样品上，在相同的实验条件下，仅在266 nm处获得陨石坑，而在532 nm处，在200个激光脉冲以下没有观察到确定的结构。这些实验结果与自制的三维程序对局部加热的数值模拟结果相一致。实验和理论方法都表明，由激光波长设定的样品吸收系数是
We have studied the influence of the laser wavelength (266 nm and 532 nm) on the tip-enhanced near-field laser ablation of conducting gold and semiconducting silicon samples. The near-field laser ablation effect was obtained by coupling a nanosecond Nd:YAG laser to an atomic force microscope. Experiments were carried out at atmospheric pressure with one and multiple laser pulses. The near-field ablation showed distinct differences in the dimensions of the craters according to the laser wavelength and the nature of the sample. On gold samples, with the same number of laser pulses, larger craters were obtained at 532 nm while the crater depths remained almost constant for both wavelengths. On silicon samples and under the same experimental conditions, craters were only obtained at 266 nm, while at 532 nm no defined structure was observed below 200 laser pulses. These experimental results were in accordance with the numerical simulations of the localized heating given by a home-made 3D code. Both the experimental and theoretical approaches showed that the sample absorption coefficient set by the laser wavelength was one of