Distribution of electric field in the sheath of an electronegative plasma
Distribution of electric field in the sheath of an electronegative plasma
复制标题
DOI：
10.1063/1.2429026
复制
发表时间：
2007-01
影响因子：
4
通讯作者：
K. Takizawa;A. Kono;K. Sasaki
中科院分区：
文献类型：
--
作者：
K. Takizawa;A. Kono;K. Sasaki
作者用激光诱导荧光光谱法测量了电负性Ar ~（3+）等离子体与偏压电极之间形成的鞘层中的电场分布。结果表明，电负性等离子体鞘层中的电场具有阶梯结构，这是由于负离子在离电极一定距离处的反射引起的。在电负性等离子体中观察到的电场与基于流体模型的理论计算进行了比较。
The authors measured the distribution of electric field in the sheath formed between an electronegative Ar∕SF6 plasma and a biased electrode by laser-induced fluorescence-dip spectroscopy. It was found that the electric field in the sheath of an electronegative plasma had a stepwise structure, which was due to the reflection of negative ions at a localized distance from the electrode. The electric field observed in an electronegative plasma was compared with a theoretical calculation based on a fluid model.