S.Maruo, K.Ikuta, H.Korogi: "Force-controllable, optically driven micromachines fabricated by single-step two-photon microstereolithography"Journal of Microelectromechanical Systems. 12・5. 533-539 (2003)
S.Maruo, K.Ikuta, H.Korogi: "Force-controllable, optically driven micromachines fabricated by single-step two-photon microstereolithography"Journal of Microelectromechanical Systems. 12・5. 533-539 (2003)
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S.Maruo、K.Ikuta、H.Korogi:“通过单步双光子微立体光刻技术制造的力可控、光学驱动的微机械”《微机电系统杂志》12・5 (2003)。
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