Practical Method for Producing a Large Amount of Isotopically Enriched Silicon by Infrared Multi-Photon Dissociation of Hexafluorodisilane

Practical Method for Producing a Large Amount of Isotopically Enriched Silicon by Infrared Multi-Photon Dissociation of Hexafluorodisilane
复制标题

六氟乙硅烷红外多光子解离大量生产同位素富集硅的实用方法

DOI:
--
复制
发表时间:
2008
期刊:
Japanese Journal of Applied Physics 47
影响因子:
--
通讯作者:
and Atsushi Yokoyama
and Atsushi Yokoyama
中科院分区:
--
文献类型:
--
作者:
Hironori Ohba;Hiroshi Akagi;Keiichi Katsumata;Masashi Hashimoto;and Atsushi Yokoyama

文献摘要

相似文献