In-Plane X-ray Diffractometry Study on Thermal Oxidation-induced Anomalous Lattice Distortion at 4H-SiC Surfaces

In-Plane X-ray Diffractometry Study on Thermal Oxidation-induced Anomalous Lattice Distortion at 4H-SiC Surfaces
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4H-SiC 表面热氧化引起的反常晶格畸变的面内 X 射线衍射研究

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发表时间:
2017
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影响因子:
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通讯作者:
Adhi Dwi Hatmanto and Koji Kita
Adhi Dwi Hatmanto and Koji Kita
中科院分区:
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文献类型:
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作者:
Takuya Hamada;Hayato Mukai;Tokio Takahashi;Toshihide Ide;Mitsuaki Shimizu;Hiroki Kuroiwa;Takuya Hoshii;Kuniyuki Kakushima;Hitoshi Wakabayashi;Hiroshi Iwai;and Kazuo Tsutsui;Adhi Dwi Hatmanto and Koji Kita

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