Single-shot on-chip spectral sensors based on photonic crystal slabs
Single-shot on-chip spectral sensors based on photonic crystal slabs
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DOI：
10.1038/s41467-019-08994-5
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发表时间：
2019-03-04
影响因子：
16.6
通讯作者：
Yu, Zongfu
中科院分区：
文献类型：
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作者：
Wang, Zhu;Yi, Soongyu;Yu, Zongfu
小型化光谱仪在便携式应用中具有巨大的潜力，例如消费电子产品，医疗保健和制造业。这些应用需要低成本和高光谱分辨率，并且最好通过具有足够空间分辨率的单次自由空间耦合光谱仪来实现。在这里，我们展示了一个片上光谱仪，可以满足所有这些要求。我们的设备使用光电探测器阵列，每个光电探测器都具有独特的响应度和丰富的光谱特征。这些响应度是由直接位于光电探测器像素顶部的光子晶体板中的复杂光学干涉产生的。光谱仪是完全互补的金属氧化物半导体（CMOS）兼容，可以以低成本大规模生产。
Miniaturized spectrometers have significant potential for portable applications such as consumer electronics, health care, and manufacturing. These applications demand low cost and high spectral resolution, and are best enabled by single-shot free-space-coupled spectrometers that also have sufficient spatial resolution. Here, we demonstrate an on-chip spectrometer that can satisfy all of these requirements. Our device uses arrays of photodetectors, each of which has a unique responsivity with rich spectral features. These responsivities are created by complex optical interference in photonic-crystal slabs positioned immediately on top of the photodetector pixels. The spectrometer is completely complementary metal-oxide-semiconductor (CMOS) compatible and can be mass produced at low cost.