Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology
Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology
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DOI：
10.1016/s0924-4247(01)00680-x
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发表时间：
2001-10-31
影响因子：
4.6
通讯作者：
Polla, D
中科院分区：
文献类型：
--
作者：
Cao, L;Mantell, S;Polla, D
提出了一种用于医疗药物输送系统的植入式微型泵的独特设计。选择蠕动泵原理。三个泵室分别由每个块状 PZT（锆钛酸铅）盘以蠕动运动驱动。正是这种蠕动运动推动液体。微型泵的设计包括入口、三个泵室、三个硅膜、三个常闭主动阀、三个大容量PZT致动器、三个致动储液器、流动微通道和出口。为了在不通电时阻止流动，微型泵被设计为常闭状态。该泵采用一体式阀门/隔膜设计，因此泵室不仅可以泵送液体，还可以用作入口阀和出口阀。为了确定所提出的微型泵的尺寸，对微型泵室进行了分析建模。分析了最大化泵送体积和减小所提议的微型泵的整体尺寸之间的设计权衡。采用有限元分析方法进行机电耦合场模拟。根据模拟结果，采用微机电系统（MEMS）技术制备了直径为6毫米和12毫米、厚度为40微米和80微米的不同硅膜。测试了这些硅膜的偏转。 PZT 执行器手动粘在微型泵室上。测试数据与挠度的有限元模拟非常吻合。导电粘合剂层显着减少了偏转。每个泵腔内需要直径12毫米、厚40吨的硅膜才能满足微型泵的设计要求。本文报道的这些硅膜的制造和实验确定了完整微型泵的尺寸和制造工艺。将使用 MEMS 制造 70 mm x 35 mm x 1.0 mm 微型泵；制造技术。完整的微型泵将被表征以验证我们的设计。 (C) 2001 Elsevier Science B.V. 保留所有权利。
A unique design of an implantable micropump for medical drug delivery systems was proposed. The peristaltic pumping principle was selected. Three pump chambers are individually actuated by each bulk PZT (lead zirconate titanate) disk in a peristaltic motion. It is this peristaltic motion that propels the fluid. The design of the micropump includes inlet, three pump chambers, three silicon membranes, three normally closed active valves, three bulk PZT actuators, three actuation reservoirs, flow microchannels, and outlet. To prohibit flow when no power is applied, the micropump was designed to be normally closed. The pump features an integral valve/membrane design such that the pump chambers not only pump the liquid, but also function as the inlet and outlet valves. To determine the dimensions of the proposed micropump, analytical modeling of the micropump chamber was conducted. The design tradeoffs between maximizing the pumped volume and reducing the overall size of the proposed micropump were analyzed. An electromechanical coupled field simulation using the FEA method was employed. Based upon the simulation results, 6 and 12 mm diameter silicon membranes with different thickness of 40 and 80 mum were fabricated using microelectromechanical systems (MEMS) technology. The deflection of these silicon membranes was tested. The PZT actuator was manually glued onto the micropump chamber. The testing data agreed well with the FEA simulation of the deflection. The conductive adhesive layer dramatically reduces the deflection. A 12 mm in diameter and 40 tm thick silicon membrane in each pump chamber is needed to meet the micropump design requirements. The fabrication and experiments of these silicon membranes reported in this paper determine the dimensions and fabrication processes for the complete micropump. A 70 mm x 35 mm x 1.0 mm micropump will be fabricated using MEMS; fabrication technology. The complete micropump will be characterized to verify our design. (C) 2001 Elsevier Science B.V. All rights reserved.