Manufacturing of flexible (ultra-)thin magnetic field sensors
Manufacturing of flexible (ultra-)thin magnetic field sensors
复制标题
柔性（超）薄磁场传感器的制造
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
T. Zerna
中科院分区：
文献类型：
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作者：
D. Ernst;J. Monch;O. Schmidt;T. Zerna
一些应用需要传感器电子器件的（超）薄和可靠的封装。特别是传感器元件在几乎每个工程领域的快速增长的使用是这一事实的主要驱动力。一个具体的应用是主动磁轴承中的磁场传感器。为了提高它们的精度和刚度，这些轴承可以通过测量弯曲的定子和转子部件之间的气隙内的磁通量来有益地操作。为了实现适当和可靠的传感器集成，传感器元件和封装都必须满足关于总高度和可弯曲性的要求。因此，最大传感器厚度不得超过200 μm。为了将传感器可靠地安装到定子磁极上，这些传感器还必须能够弯曲到25 mm的半径。因此，传感器封装也需要是柔性的。
Several applications require (ultra-)thin and reliable packaging of the sensor electronics. Especially the rapidly increasing use of sensor elements in nearly every field of engineering is the main driver for that fact. One specific application is magnetic field sensors in active magnetic bearings. In order to improve their precision and stiffness those bearings can be beneficially operated by measuring the magnetic flux inside the air gap in between the curved stator and rotor components. To achieve proper and reliable sensor integration, both the sensor elements and the packaging have to meet the requirements concerning total height and bendability. Therefore the maximum sensor thickness must not exceed 200 μm. For the reliable mounting of the sensor onto the stator pole it is also necessary, that those sensors have to be bendable down to radii of 25 mm. As a consequence the sensor package needs to be flexible as well.