Application of Nanoimprint Technology in MEMS-Based Micro Direct-Methanol Fuel Cell ( $\mu$-DMFC)
Application of Nanoimprint Technology in MEMS-Based Micro Direct-Methanol Fuel Cell ( $\mu$-DMFC)
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DOI：
10.1109/jmems.2008.926979
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发表时间：
2008-07
影响因子：
2.7
通讯作者：
Yi Zhang;Jian Lu;Haoshen Zhou;T. Itoh;R. Maeda
中科院分区：
文献类型：
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作者：
Yi Zhang;Jian Lu;Haoshen Zhou;T. Itoh;R. Maeda
介绍了纳米压痕技术在基于微电子机械系统(MEMS)的微型直接甲醇燃料电池(MU-DMFC)中的应用，以期达到高性能和低成本的目的。我们首次报道了具有不同微观图案的质子化Nafion 117膜在100℃-150℃温度范围内的纳米印迹行为。当温度为130℃时，质子化Nafion 117膜的纳米印迹图案转印效果最好。在优化的纳米压印工艺参数下，利用硅模在质子化Nafion 117膜上成功地形成了平均高度约为60 nm的微柱结构。在纳米印迹Nafion 117膜上溅射涂覆20 nm厚的铂膜作为催化剂，然后夹在微细硅电极中形成纳米印迹MU-DMFC原型。在1M甲醇溶液和空气中被动进料的情况下，纳米印迹MU-DMFC的开路电压约为0.74V，最大功率密度为0.2MW2，远远高于目前最先进的MEMS基MU-DMFC。实验结果表明，在没有传统碳纸基多孔电极的情况下，纳米印迹MU-DMFC样机实现了较大的三相反应表面积、较高的催化剂效率和较薄的扩散层厚度。展示了纳米压痕技术在基于MEMS的MU-DMFC和其他微功率器件中的应用前景。
This paper presents the application of the nanoimprint technology in microelectromechanical-systems (MEMS)-based micro direct-methanol fuel cell (mu-DMFC) for high performance and low cost. We first reported the nanoimprint behavior of the protonated Nafion 117 membrane with different micro patterns within the temperature range of 100degC -150degC. The best pattern transfer was achieved at 130degC for the nanoimprint of the protonated Nafion 117 membrane. Micro pillar structure with an average height of about 60 nm was successfully formed on the protonated Nafion 117 membrane using silicon molds with the optimized nanoimprint parameters. The nanoimprinted Nafion 117 membrane was coated with 20-nm-thick Pt films as catalyst by sputtering and then sandwiched with microfabricated silicon electrodes to form a nanoimprinted mu-DMFC prototype. With passive feeding of 1-M methanol solution and air, the nanoimprinted mu-DMFC had an open-circuit voltage of about 0.74 V and a maximum power density of 0.2 mW2, which were much higher than those of the state-of-the-art MEMS-based mu-DMFC. The experimental results suggested that large triple-phase reaction surface, high catalyst efficiency, and thin diffusion layer thickness had been realized in the nanoimprinted mu-DMFC prototype with the absence of traditional carbon-paper-based porous electrode. An attractive prospect was demonstrated for the application of the nanoimprint technology in MEMS-based mu-DMFC and other micro power devices.