Hollow optical fibers for ultraviolet and vacuum ultraviolet light
Hollow optical fibers for ultraviolet and vacuum ultraviolet light
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DOI：
10.1109/jstqe.2004.837710
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发表时间：
2004-11-01
影响因子：
4.9
通讯作者：
Miyagi, M
中科院分区：
文献类型：
--
作者：
Matsuura, Y;Miyagi, M
制造由带有铝薄膜内涂层的玻璃毛细管组成的空心光纤，用于传输紫外光和真空紫外光。铝膜通过采用金属有机铝作为前体的化学气相沉积法形成。使用 ArF-和 F-2-准分子激光器评估铝涂层中空纤维的传输性能。还进行真空紫外区域的光谱测量。
Hollow optical fibers composed of glass capillary tubing with an inner coating of aluminum thin film are fabricated for delivery of ultraviolet and vacuum ultraviolet light. The aluminum film is formed by a chemical vapor deposition method employing a metalorganic aluminum as a precursor. Transmission properties of the aluminum-coated hollow fibers are evaluated with ArF- and F-2-excimer lasers. Spectroscopy measurement in the vacuum ultraviolet region is also performed.