Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications
Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications
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DOI：
10.1039/d0nr07539f
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发表时间：
2021
期刊：
影响因子：
6.7
通讯作者：
Huigao Duan
中科院分区：
文献类型：
--
作者：
Ping Li;Siyu Chen;Houfu Dai;Zhengmei Yang;Zhiquan Chen;Yasi Wang;Yiqin Chen;Wenqiang Peng;Wubin Shan;Huigao Duan
The past few decades have witnessed growing research interest in developing powerful nanofabrication technologies for three-dimensional (3D) structures and devices to achieve nano-scale and nano-precision manufacturing.
