Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications
Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications
复制标题
用于自适应光学应用的微机械变形镜的制造和表征
DOI：
10.1117/12.158786
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发表时间：
1993
期刊：
影响因子：
--
通讯作者：
E. C. Vote
中科院分区：
文献类型：
--
作者：
L. Miller;M. Agronin;R. Bartman;W. Kaiser;T. Kenny;R. Norton;E. C. Vote
研制了一种新型微机械静电控制变形反射镜，并对其进行了表征。该设备结合了微型仪器、自适应光学和控制领域，形成了一种相对易于加工、价格低廉、重量轻、可与驱动和传感电子设备集成的硅基反射镜组件。薄膜反射镜的静电控制是在低电压驱动下进行的，而不需要复杂的PZT或其他平移型阵列的构造。此外，用于变形膜镜的低应力富硅SixNy薄膜与硅支撑架进行了热匹配。通过在与薄膜反射镜分开的绝缘衬底上重新设计电极图案，可以实现反射镜形状的定制设计。给出了一个只有一个致动器的拉动式圆形反射镜的测试结果，作为低应力SixNy柔性薄膜低电压驱动的概念验证。形成薄膜的SixNy承受着拉应力。这种拉应力增加了薄膜偏转所需的电压，但确保了反射镜的中心偏转与施加的压力之间存在线性关系。这将大大简化该设备的闭环系统运行所需的控制算法。
A novel micromachined electrostatically controlled deformable mirror has been fabricated and characterized. This device combines the fields of microinstruments, adaptive optics and controls to form a silicon-based mirror assembly that is relatively simple to process, inexpensive, lightweight, and integrable with drive and sensing electronics. Electrostatic control of a thin membrane mirror is demonstrated with low voltage actuation and without the need for complex construction of PZT or other translator-type arrays. In addition, the low- stress Si-rich SixNy film used as the deformable membrane mirror is thermally matched to the silicon supporting frame. Custom design of the mirror shape can be implemented by redesigning the electrode pattern on an insulating substrate separate from the thin film mirror. Test results from a pull-only circular mirror with a single actuator are presented as a proof of concept for low voltage actuation of a low-stress SixNy flexible membrane. The SixNy which forms the membrane is under tensile stress. This tensile stress increase the voltage required for deflection of the membrane, but insures a linear relationship between the center deflection of the mirror and the applied pressure. This should significantly simplify the controls algorithm required for closed-loop operation of this device.