High performance Poly-Si TFTs with Highly Bi-axially Oriented Poly-Si Thin Films Using DLB Continuous-wave Laser Lateral Crystallization

High performance Poly-Si TFTs with Highly Bi-axially Oriented Poly-Si Thin Films Using DLB Continuous-wave Laser Lateral Crystallization
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使用 DLB 连续波激光横向结晶的具有高度双轴取向多晶硅薄膜的高性能多晶硅 TFT

DOI:
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发表时间:
2014
期刊:
Jpn. J. Appl. Phys.
影响因子:
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通讯作者:
Tadashi Sato and Koji Kotani
Tadashi Sato and Koji Kotani
中科院分区:
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文献类型:
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作者:
Masayuki Yamano;Shin-Ichiro Kuroki;Tadashi Sato and Koji Kotani

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