Anisotropy effects in physical sputtering investigated by laser-induced fluorescence spectroscopy
Anisotropy effects in physical sputtering investigated by laser-induced fluorescence spectroscopy
复制标题
激光诱导荧光光谱研究物理溅射中的各向异性效应
DOI:
10.1103/physrevb.62.9349
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发表时间:
2000
影响因子:
3.7
通讯作者:
H. Döbele
中科院分区:
文献类型:
--
作者:
A. Goehlich;N. Niemoeller;H. Döbele