Planar-type MEMS tactile sensor integrating micro-macro detection function of fingertip to evaluate surface touch sensation

Planar-type MEMS tactile sensor integrating micro-macro detection function of fingertip to evaluate surface touch sensation
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DOI:
10.7567/1347-4065/ab3903
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发表时间:
2019-08
影响因子:
1.5
通讯作者:
Kazuki Watatani;K. Terao;F. Shimokawa;H. Takao
Kazuki Watatani;K. Terao;F. Shimokawa;H. Takao
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
Kazuki Watatani;K. Terao;F. Shimokawa;H. Takao

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在这项研究中,开发了一种集成微观和宏观触觉检测组件的触觉传感器,以重现人类指尖的微观/宏观触摸感觉。微型触觉检测组件包括一个直径为500μm的接触器,模仿指纹脊的形状和大小,并以高空间分辨率检测表面的微观形状和局部摩擦。宏观触觉检测组件通过模拟指尖皮肤的广域传感器检测整体接触力和光滑度。使用所制造的装置对具有不同组织结构的三种织物样品进行了分析。检测织物的精细表面图案和滑动摩擦,并清楚地提取根据组织结构的差异。此外,使用两个检测组件成功获得了触觉信息的接触力依赖性,这是关于织物触感的重要因素。
In this study, a tactile sensor integrating micro- and macro-scale tactile detection components was developed to reproduce the micro/macro touch sensations of the human fingertip. The micro-scale tactile detection component comprises a 500 μm diameter contactor that mimics the shape and size of the fingerprint ridge, and detects the micro shape of surfaces and local friction with high spatial resolution. The macro-scale tactile detection component detects the overall contact force and slipperiness via a wide-area sensor that mimics the skin of the fingertip. Three fabric samples with different weave structures were analyzed using the fabricated device. The fine surface pattern of the fabrics and slip friction were detected, and the differences according to the weave structure clearly extracted. Additionally, the contact force dependency of the tactile information, which is an important factor with regard to the touch sensation of a fabric, was successfully obtained using the two detection components.