Backside observation technique for SAW distribution under electrodes
Backside observation technique for SAW distribution under electrodes
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电极下SAW分布的背面观察技术
DOI：
10.1109/ultsym.2003.1293241
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
A. Ito
中科院分区：
文献类型：
--
作者：
S. Wakana;A. Miyamoto;A. Ito
已经开发出一种采用偏振检测方法的改进型 SAW 分布观测技术。从基板背面投射探测光以检测电极下方的 SAW。观察结果证明，泄漏SAW的根源是从IDT（叉指换能器）到电极的穿透，并且母线作为波导传输波。
A modified SAW distribution observation technique, which employs the polarization detection method, has been developed. A probe light was projected from the backside of the substrate to detect the SAW under the electrodes. The observed results proved that the origin of the leakage SAW is the penetration from the IDT (inter digital transducer) to the electrodes, and busbars transmit the wave as waveguides.