Integration of a UV curable polymer lens and MUMPs structures on a SOI optical bench
Integration of a UV curable polymer lens and MUMPs structures on a SOI optical bench
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在 SOI 光具座上集成 UV 固化聚合物透镜和 MUMP 结构
DOI：
10.1088/0960-1317/17/8/037
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发表时间：
2007
影响因子：
2.3
通讯作者：
W. Fang
中科院分区：
文献类型：
--
作者：
J. Hsieh;S. Hsiao;Chung;W. Fang
本工作提出了将聚合物透镜、多晶硅MUMP和单晶硅损伤结构集成在SOI晶片上形成硅光学平台的设计思想。该方法实现了硅片上各种光学元件的单片集成，从而提高了硅光学台的设计灵活性。建立了包括SOI晶片表面和体微加工在内的制造工艺，以实现具有面内和面外光轴的双凸球形聚合物透镜。此外，还利用该方法设计了一种由面内聚合物透镜、粗纤维夹持器和电热驱动器驱动的机械快门组成的微型器件。综上所述，本研究显著提高了SiOBS的设计灵活性和功能。
This work presents the design concept of integrating a polymer lens, poly-Si MUMPs and single-crystal-silicon HARM structures on a SOI wafer to form a silicon optical bench. This approach enables the monolithic integration of various optical components on the wafer so as to improve the design flexibility of the silicon optical bench. Fabrication processes, including surface and bulk micromachining on the SOI wafer, have been established to realize bi-convex spherical polymer lenses with in-plane as well as out-of-plane optical axes. In addition, a micro device consisting of an in-plane polymer lens, a thick fiber holder and a mechanical shutter driven by an electrothermal actuator is also demonstrated using the present approach. In summary, this study significantly improves the design flexibility as well as the functions of SiOBs.