Scattering and three-dimensional imaging in surface topography measuring interference microscopy.
Scattering and three-dimensional imaging in surface topography measuring interference microscopy.
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DOI：
10.1364/josaa.411929
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发表时间：
2021-02
期刊：
影响因子：
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通讯作者：
Rong Su;J. Coupland;C. Sheppard;R. Leach
中科院分区：
文献类型：
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作者：
Rong Su;J. Coupland;C. Sheppard;R. Leach
表面形貌测量干涉显微镜是一种三维（3D）成像技术，可对工业和生物医学样品进行定量分析。存在许多不同的仪器模式和配置，但它们都具有相同的理论基础。在本文中，我们讨论了一个统一的理论框架，三维图像（干涉图）形成的干涉显微镜。我们展示了如何散射振幅是线性相关的表面形貌根据玻恩和基尔霍夫近似，并突出每个的主要差异和相似之处。参考埃瓦尔德和麦卡琴球，表征照明和散射波的空间频率与表征物体的空间频率之间的关系被定义和公式化为3D线性滤波过程。结果表明，对于近平面的情况下，三维滤波过程可以减少到两个维度下的小高度近似。然而，统一的3D框架提供了显着的额外洞察干涉显微镜中使用的扫描方法，如干涉散焦的影响和方法，以减轻由光学系统的像差引入的错误。此外，它是可能的，包括多重散射的非线性效应到广义框架。最后，我们认为固有的非线性估计时，从记录的干涉表面形貌。
Surface topography measuring interference microscopy is a three-dimensional (3D) imaging technique that provides quantitative analysis of industrial and biomedical specimens. Many different instrument modalities and configurations exist, but they all share the same theoretical foundation. In this paper, we discuss a unified theoretical framework for 3D image (interferogram) formation in interference microscopy. We show how the scattered amplitude is linearly related to the surface topography according to the Born and the Kirchhoff approximations and highlight the main differences and similarities of each. With reference to the Ewald and McCutchen spheres, the relationship between the spatial frequencies that characterize the illuminating and scattered waves, and those that characterize the object, are defined and formulated as a 3D linear filtering process. It is shown that for the case of near planar surfaces, the 3D filtering process can be reduced to two dimensions under the small height approximation. However, the unified 3D framework provides significant additional insight into the scanning methods used in interference microscopy, effects such as interferometric defocus and ways to mitigate errors introduced by aberrations of the optical system. Furthermore, it is possible to include the nonlinear effects of multiple scattering into the generalized framework. Finally, we consider the inherent nonlinearities introduced when estimating surface topography from the recorded interferogram.