Monolithically fabricated double-ended tuning-fork-based force sensor
Monolithically fabricated double-ended tuning-fork-based force sensor
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DOI：
10.1063/1.2194123
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发表时间：
2006-05-01
影响因子：
3.2
通讯作者：
Zhang, HD
中科院分区：
文献类型：
--
作者：
Fukuzawa, K;Ando, T;Zhang, HD
介绍了一种适用于精密间隙控制的高灵敏度力传感器。它结合了双端音叉（DETF）谐振器与悬臂梁。当待测力施加到悬臂梁上时，DETF梁的谐振频率会因轴向力的变化而变化。基于DETF的传感器可以将力检测为由于谐振频率变化而引起的振幅变化。对传感器的性能进行了理论和实验研究。传感器是刚性的，并且可以测量样品或探针高度变化小于约1nm的力。实验获得的力的最小检测限为19 μ N，这可以提高一个以上的数量级，根据理论估计。基于DETF的传感器和固定探针或样品的组合预期提供具有精确间隙控制的表面力的测量。它可以用于各种领域，如界面科学，探针显微镜和微摩擦学。(C)2006年，美国物理学会。
A highly sensitive force sensor that is suitable for precise gap control is presented. It combines a double-ended tuning fork (DETF) resonator with a cantilever beam. When the force to be measured is applied to the cantilever beam, the resonant frequency of the DETF beam changes due to the change in axial force. The DETF-based sensor can detect the force as an amplitude change due to the resonant frequency change. The performance of the sensor was theoretically and experimentally investigated. The sensor is rigid and can measure the force with a change in the sample or probe height of less than about 1 nm. The experimentally attained minimum detection limit of the force was 19 mu N and this can be improved by more than one order of magnitude according to theoretical estimation. The combination of the DETF-based sensor and the fixed probe or sample is expected to provide the measurement of the surface force with precise gap control. It can be useful for various fields such as interface science, probe microscopy, and microtribology. (C) 2006 American Institute of Physics.